Handbook of Silicon Semiconductor Metrology
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and o…
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Produktdetails
- ISBN: 978-0-203-90454-1
- EAN: 9780203904541
- Produktnummer: 13801223
- Verlag: Taylor & Francis Ltd.
- Sprache: Englisch
- Erscheinungsjahr: 2001
- Seitenangabe: 896 S.
- Plattform: PDF
- Masse: 29'498 KB
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