Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology [With CDROM]
The worldwide semiconductor community faces increasingly difficult challenges as it moves into the manufacturing of chips with feature sizes approaching 100 nm and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Topics include: integrated circuit history, challenges and overviews, front end, lithography, interconnect and back end, and critical analytical techniques. Characterization and metrology are key enablers for developing new semiconductor technology…
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Produktdetails
Weitere Autoren: Diebold, Alain C. (Hrsg.) / Shaffner, Thomas J. (Hrsg.)
- ISBN: 978-0-7354-0152-5
- EAN: 9780735401525
- Produktnummer: 34373722
- Verlag: Springer Pg
- Sprache: Englisch
- Erscheinungsjahr: 2003
- Seitenangabe: 818 S.
- Masse: H28.5 cm x B22.6 cm x D5.0 cm 2'107 g
- Abbildungen: CDROM
- Reihenbandnummer: 683
- Gewicht: 2107
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