Characterization and Metrology for ULSI Technology 2005
The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed.Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. I…
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Produktdetails
Weitere Autoren: Seiler, David G. (Hrsg.) / Diebold, Alain C. (Hrsg.)
- ISBN: 978-0-7354-0277-5
- EAN: 9780735402775
- Produktnummer: 36765256
- Verlag: Springer Nature
- Sprache: Englisch
- Erscheinungsjahr: 2005
- Seitenangabe: 667 S.
- Masse: H28.1 cm x B22.0 cm x D4.5 cm 1'923 g
- Reihenbandnummer: 788
- Gewicht: 1923
2 weitere Werke von D. G. Seiler:
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