Frontiers of Characterization and Metrology for Nanoelectronics: 2009 International Conference on Frontiers of Characterization and Metrology for Nano
As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. We have entered an era where nanotechnology is required to meet the demand for smaller, faster, cheaper, and more complex functional chips. Innovative metrology and characterization methods have become critical. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It comprises applications in nanoelectronic materials and devices, research and development, and…
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Produktdetails
Weitere Autoren: Diebold, Alain C. (Hrsg.) / Mcdonald, Robert (Hrsg.)
- ISBN: 978-0-7354-0712-1
- EAN: 9780735407121
- Produktnummer: 28453835
- Verlag: Springer Nature
- Sprache: Englisch
- Erscheinungsjahr: 2009
- Seitenangabe: 398 S.
- Masse: H28.0 cm x B22.1 cm x D3.0 cm 1'461 g
- Abbildungen: CDROM
- Reihenbandnummer: 1173
- Gewicht: 1461
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